E-Beam Evaporators
EBV
Standard Electron Beam Evaporator
- UHV compatible, low outgassing
- High flux rates of low vapour pressure materials
- High-purity evaporation
- Hearth volumes: 40 cm³ or 100 cm³
- Long filament lifetime
- Easy maintenance
- Optimized versions for SiGe MBE available
EBVM
Multi-Pocket Electron Beam Evaporator
- Linear multihearth UHV e-beam evaporator
- full UHV integrity by hermetic all-metal sealed design, low outgassing
- Bakeout temperature 200°C
- Evaporation origin aligned on flange centre
- Reliable manual linear translation, optional motorized translation with optical positioning
- Hearth volumes 8cm³ (x4 or x6); 15cm³ (x3 or x6)
- Long filament life with 270° beam deflection
- High frequency beam deflection system
EBVV
Vertical Electron Beam Evaporator
- Fully UHV compatible
- Small dimensions fit onto DN63CF (O.D. 4.5'') ports
- Hearth volumes 4 cm3 or 5 cm3
- High purity evaporation of metals and dielectrica
- Long filament lifetime and easy maintenance
- 270° beam deflection
- High frequency x-y-beam deflection system
- Silicon shielding parts for use in SiGe-MBE
HV
High Voltage Power Supplies
- GENIUS evaporator control unit
- CARRERA high-voltage power supply
- (3 kW, 5 kW or 10 kW)
- FPS filament power supply
