ELECTRICAL PROBE SYSTEMS
- INSTEC's Probe Systems offer an integrated solution for performing component-level electrical measurements over a wide temperature range. Compact Mini Probe Stages enable an existing inspection microscope or optical test setup to be converted easily into a precision temperature-controlled semiconductor testing and qualification station. Analytical probe stations are fully featured industry-standard platforms for all modern probing applications and testing. Benchtop Probe Stations provide the user with four independent electrical probes with X,Y,Z micropositioning for precise placement without opening the sample chamber.Highly configurable probe systems meet a range of requirements for atmospheric and temperature control, sample areas, and electrical measurements.
ANALYTICAL PROBE STATIONS
PSM MINIATURE ANALYTICAL PROBE STATION
- Compact & affordable design for research laboratory
- Up to 6 inch wafer testing with 50um electrodes / PAD probes
- Precision linear screw drives with zero back lash
- LD/LED/PD light intensity / wavelength testing
- IV/CV characteristic materials and device testing
PSE WAFER TESTING PROBE STATION
- Compatible with high magnification metallographic microscope, with fine tuned movement
- All purpose use for academic and industry laboratory research
- Up to 12 inch wafer testing with 1um electrodes / PAD probes
- Precision linear screw drives with zero back lash
- LD/LED/PD Light intensity / wavelength testing
- IV/CV Characteristic testing of materials / devices
- High frequency characteristic device testing up to 300GHz
PSH COMPREHENSIVE ANALYTICAL PROBE STATION
- Stable structure with quick-lifted and fine-tuned Platen
- Suitable for probe card installation and usage
- Compatible with high magnification metallographic microscope
- Up to 12 inch wafer testing
- Precision linear screw drives with zero back lash
- Comfortable large handle
- Internal circuit / electrode / PAD probe
- LD / LED / PD Light intensity / wavelength testing
- IV / CV Characteristic testing of materials / devices
- High frequency characteristic device testing up to 300GHz
BENCHTOP THERMAL PROBE STATIONS
TP102V-MPS Thermoelectric Probe Station
- The TP102V-MPS is a versatile probing station for use in thermally controlled electrical probing applications. The thermoelectric heater/cooling device allows for precise temperature control between -40°C to 160°C without use of LN2 or other consumeable coolants. Externable prober manipulators allow for precise landing of probers onto small electrical pads in-situ.
- Modular design allows for additional probers, electrical feedthroughs, or sensors can easily be added.
HCP421V-MPS Vacuum Chamber Probe Station
- Tabletop design with small footprint integrates with modern instruments and benches
- -190°C - 400°C (600°C option available, see HCP621G-MPS)
- Fits 10 mm - 50 mm samples and wafers
- Sealed chamber with gas purging and/or vacuum capabilities
- 4 independent electrical probes with remote mechanical positioning
- Up to 7 probers available
VACUUM BENCHTOP PROBE STATIONS
- Tabletop design with small footprint integrate with modern instruments and benches
- -190°C - 1000°C depending on model
- Fits 10 mm - 300 mm wafers and devices
- Sealed chamber with gas purging or vacuum capability
- 4 independent electrical probes with remote positioning
STANDARD MINI PROBE STAGES
TP102G-PM
- Flagship mini electrical probe stage
- -30°C - 160°C with thermoelectric cooling and resistive heating option
- 40 mm × 40 mm sample area
- Closed chamber with gas purging capability. Optional Vacuum-tight sample chamber model
- 4 independent electrical probes with manual positioning
- Optional triaxial connection
- Optional extra feedthrough
HCP421V-PM
- Flagship mini electrical probe stage
- Compact design to fit on Raman, optical microscope, reflection FTIR microscope
- -190°C - 400°C with liquid nitrogen cooling option
- 28 mm × 30 mm sample area
- Sealed chamber with vacuum capability
- 4 independent electrical probes with manual positioning
- Optional triaxial connection for pA measurement
- Optional extra feedthrough
HCP621G-PM
- Flagship mini electrical probe stage
- -190°C - 600°C with liquid nitrogen cooling option
- Compact design to fit on Raman, optical microscope, reflection FTIR microscope
- 28 mm × 30 mm sample area
- 4 independent electrical probes with manual positioning
- Optional triaxial connection for pA measurement
- Optional extra feedthrough
SPECIALTY MINI PROBE STAGES
HP1000G-PM
- Flagship mini electrical probe stage
- RT - 1000°C with liquid nitrogen cooling option
- 25 mm × 25 mm sample area
- 4 independent electrical probes with manual positioning
- Optional triaxial connection
- Optional extra feedthrough
HCP621G-PMH
- Designed for Hall effect measurement. Made with non-ferromagnetic materials
- Flagship mini electrical probe stage
- -190°C - 600°C with liquid nitrogen cooling option
- 30 mm × 28 mm sample area
- Closed chamber with gas purging capability
- 4 independent electrical probes with manual positioning
- Optional triaxial connection
- Optional extra feedthrough