Thermal evaporation은 저항으로 가열되는 서포트를 통해 증발 온도로 재료를 가열하는 박막 증착 기술로써, 증발 온도가 약 1700 °C 이하인 금속에 가장 적당합니다. Moorfield의 MiniLab 제품군은 전형적인 고온증착장비입니다.
"Thermal evaporation is a straightforward means of thin film deposition with materials being heated to evaporation temperatures via a resistively heated support. Thermal evaporation is best suited to metals with evaporation temperatures of about 1700 °C or below. Moorfield’s MiniLab range is ideally suited to the thermal evaporation technique."
High-performance metals, organic evaporation in compact packages for benchtop location. Superior, efficient performance and ideal for OLED, OPV and OFET research. Read more
Low temperature evaporation (LTE)은 유기물 (OLED, OPV 및 OFET 애플리케이션)을 포함하여 600°C 미만의 낮은 증발 온도를 가진 재료에 적합합니다. Moorfield는 MiniLab 시스템과 벤치탑 nanoPVD-T15A 시스템을 포함하여 LTE를 위한 다양한 솔루션을 제공합니다.
"LTE is suitable for materials with low evaporation temperatures of <600 °C, including organics (for OLED, OPV and OFET applications). Moorfield offers a range of solutions for LTE, including our MiniLab systems and our bench top nanoPVD-T15A system."
High-performance metals, organic evaporation in compact packages for benchtop location. Superior, efficient performance and ideal for OLED, OPV and OFET research. Read more
Electron beam evaporation (E-beam evaporation)은 고에너지 전자스트림에 의한 충돌을 통해 증발물질을 고온으로 가열함으로써, 내화 금속 및 금속 산화물을 포함하여 증발 온도가 매우 높은 재료의 증착에 쓰이는 기술입니다. Moorfield의 MiniLab 제품군은 전형적인 electron beam evaporation 장비입니다.
"E-beam evaporation is a suitable technique for deposition of materials with the highest evaporation temperatures, including refractory metals and metal oxides. Moorfield’s MiniLab range is ideal for electron beam evaporation."
MiniLab 125 tools take the modular concept to the pilot-scale level. Large chambers allow for increased-size component sets for coating large areas, and a range of load-lock options enable high-throughput operation. At the same time, systems are fully customisable to match specific applications. Read more
MiniLab 090 systems are glovebox-compatible for atmosphere-sensitive applications. Tall chambers are ideal for high-performance evaporation, but magnetron sputtering is also available. Read more
MiniLab 080 systems offer tall chambers ideally suited for thermal, LTE and e-beam evaporation techniques requiring longer working distances for optimum uniformity. Read more
The most popular platform in our MiniLab range, MiniLab 060 systems have front-loading box-type chambers ideal for multiple-source magnetron sputtering but also thermal and e-beam evaporation. Read more
