DCS, Dual Cluster Source
The use of source clusters increases the capacity of your UHV-System, by using only a single port for two individual sources.
- Cluster sources increase the capacity of UHV systems
- Customized with two independent and different types of effusion cells on a single flange
- Two individual shutters or multi-position shutter and additional cool tube available
- Minimized temperature crosstalk because of effective integrated water cooling
- Various crucible types and sizes available
- Very compact cell design
- Surprisingly low power consumption
QCS, Quad Cluster Source
Quad Cluster Sources are designed as four-cell-clusters. They can add more sources to your MBE system, either as thin-film deposition source in nanosciences or as doping source.
- Source clusters increase the capacity of MBE systems
- 4 cells on one DN40CF (2.75") flange or DN63CF (4.5") flange
- Very compact cell design
- Various crucible types and sizes available
- Integrated water cooling
- Multi-position shutter for QCS 40 and QCS 63
DDS, Dual Doping Source
- Cluster sources increase the capacity of UHV systems
- Customized designs with all kind of effusion cells
- Compact and intelligent cell design
- Various crucibles available
- Solutions with integrated cooling shrouds and shutters
Customized Source Clusters, Individual and particular cases
Because of the large variety of different UHV systems each cluster is individually designed.
- Large variety of particular case sources available
- Customized solutions with special designs
- Close collaboration with customers
- Consideration of special customomers' needs
- Manifacturing of every practicable request
