Sputtering Source
당사 (주)연진에스텍의 Gencoa (Liverpool, UK)는 오랜 시간의 경험과 광범위한 기술 노하우를 통해 고객에게 완벽한 스퍼터링 솔루션을 제공합니다. 다양한 magnetic option을 갖는 직사각형 및 회전형 마그네트론은 pre-cleaning을 위한 다양한 이온 소스와 강력한 Speedflo 프로세스 컨트롤러 및 Optix 센서와 같은 프로세스 툴과 함께 사용될 수 있습니다.
Circular
From the newly-designed HV sources to longer-established products, Gencoa's circular magnetrons are available with a wide choice of magnetic and mechanical options.
Rectangular
The widest range of rectangular magnetrons on the market for both internal and external mounting.
Rotatable
The Gencoa Rotatable System (GRS) family of magnetrons offer the ultimate in performance and flexibility.
Optix
Gencoa's groundbreaking vacuum sensor delivering accurate measurements through a wide range of pressures.
Speedflo
The popular reactive process controller from Gencoa – available in two options, each providing a choice of sensor configurations.
VACGAS-G16
Industrially-robust sensing unit for detection of chalcogen-based species including oxygen, sulphur and selenium.
Plasma source
Linear and circular sources, offering a robust and flexible means of pre-cleaning polymer and glass substrates prior to thin film deposition.
Effusion Cell
A collaborative development between Nano4Energy and Gencoa, delivering an innovative solution for single-stack sputtering.
Power supplies
Power sources for providing a complete solution for Gencoa IM-type linear and circular plasma sources.