Effusion Cells
WEZ, Standard Effusion Cell
- Applicable in most UHV systems up to 1400°C
- Compatible with all standard MBE crucibles
- Crucible capacities from 2 to 200 cm³
- Most effective heating system with excellent reliability and long lifetime
- Hot lip, cold lip and dual filament designs
- Optional on-flange integrated cooling shroud and shutter
PEZ, Production Effusion Cell
- Compatible with standard MBE systems, e.g. from Varian, EPI, Veeco, VG, or Riber
- Crucible capacities 40-1700 cm³
- Precise run-to-run flux reproducibility
- Customized beam shaping crucible inserts available
- Excellent reliability and long lifetime
- Hot lip, cold lip and dual filament designs
- Optional integrated cooling shroud
NTEZ, Low Temperature Effusion Cell
- Applicable in most UHV systems
- Evaporation of metals, compounds and organic materials between 80°C and 1000°C
- Crucible capacities from 2 to 200 cm³
- Robust, reliable tantalum wire heating system
- Excellent temperature stability and controllability
- Optional on-flange integrated cooling shroud and shutter
TCC, Thermal Cracker Cell
- Full PBN solution for corrosive materials like Te, Sb, Se, As, Mg
- DN40CF (O.D. 2.75" ) mounting flange compatible with all MBE systems
- Thermal cracking up to 1300°C
- 35 cm3 or 130 cm3 PBN crucible
- Excellent thermal isolation between low temperature reservoir and hot cracking zone
- Integrated water cooling for cracker stage
- Integrated rotary shutter
OME, Organic Material Effusion Cell
- Patented Thermal Conduction Cooling (TCC)
- Ideal for evaporation of sensitive organic materials in UHV and OLED applications
- Temperature range 15-300°C
- Fast and precise temperature control < ±0.02K with excellent temperature stability
- Crucibles capacities 2 cm³, 10 cm³ and 35 cm³
- Full UHV and MBE compatibility
OREZ, Oxygen Resistant Effusion Cell
- Oxygen resistance option available for most wire heater effusion cells
- Applicable in oxide MBE systems with chamber pressures up to several mbar
- Nickel alloy wire heaters up to 1000°C
- Noble metal alloy wire heaters up to 1200°C
- Ultimate oxygen resistance by use of platinum shielding
- Optional on-flange integrated cooling shroud and shutter
HTEZ, High Temperature Effusion Cell
- Compatible with most MBE systems
- Various crucible sizes and materials;
- crucible capacities 1.5, 10, and 35 cm³
- Self-supporting tungsten wire heater
- Clean operation in UHV up to 1900°C
- High reliability and long lifetime
- Cell option with integrated cooling shroud and shutter
HTEZ-W, High Temperature Effusion Cell
- Compatible with most MBE systems
- Various crucible materials; crucible capacity 10 cm³
- No ceramic insulation parts in hot area
- Free-standing thick tungsten wire filament
- Clean operation in UHV up to 2000°C
- High reliability and long lifetime
- Water cooled current contacts
HTS, High Temperature Source
- Clean operation in UHV up to 2000°C
- Excellent beam uniformity for doping and layer growth applications
- Flat pyrolytic graphite or tungsten wire filaments
- Wide opening crucibles with capacities from 5 to 200 cm³
- Various crucible materials
- No ceramic parts in the hot zone
DECO, GaP Decomposition Source
- High-purity phosphorus (P2) source
- Simple and safe operation with non-inflammable GaP source material
- Compatible with most UHV and MBE systems
- Various crucibles from 10 to 420 cm³
- Precise and fast flux control with high reliability
- Optional on-flange integrated cooling shroud and shutter
SUSI, Silicon Sublimation Source
- Thermal sublimation of silicon from high purity intrinsic or highly doped Si filament
- Excellent growth of thin silicon layers
- Compatible with most MBE systems
- Water-cooled electrical contacts
- Inner filament shielding with pure silicon parts
- No ceramic parts in the hot zone
SUKO, Carbon Sublimation Source
- Thermal sublimation of carbon from high purity graphite filament
- Excellent growth of thin carbon films or Si-C alloys
- Compatible with most MBE systems
- Water-cooled electrical contacts
- Inner filament shielding with pure pyrolytic graphite parts
- No ceramic or metal parts in the hot zone
SUKO-A, Atomic Carbon Sublimation Source
- Thermal sublimation of atomic carbon
- Refractory metal tube filament filled with ultrapure carbon
- Only pyrolytic graphite and tantalum parts in hot area
- Water-cooled power feedthrough
- Cooling shroud and shutter optionally available
- Compatible with UHV analysis systems and MBE growth chambers
