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MBE, Molecular Beam Epitaxy System

Dr. Eberl MBE-Komponenten GmbH, Germany

Industrial MBE Sources

Industrial MBE Sources

PEZ-G Production Scale CIGS Evaporation Source

PEZ-G Production Scale CIGS Evaporation Source
  • Large capacity up to 55 kg Cu
  • Very high flow rate up to 220 g/h for Cu
  • Long lifetime
  • Designed for easy maintenance
  • Proprietary encapsulation of heater and shielding
  • Simple ingot handling
  • High material efficiency through beam shaping insert
  • Encapsulated thermocouple
  • Pyrometeric temperature control option
  • Well proven in the field

Data Sheet

 

LES Production Scale Linear Evaporation Source

LES: Linear evaporation source for industrial applications

 
  • Large capacity up to 6000 cm³
  • High flow rate
  • Long lifetime
  • Propriatary encapsulation of heater and inner shielding
  • Excellent homogeneity due to beam shaping nozzle design
  • Encapsulated thermocouple
  • Evaporation zones up to 220 cm width

 

PVSS Production Scale Valved Selenium and Sulfur Source

PVSS 320-9600 for industrial applications

 
  • Reservoir Volume 9600 cm³, larger volume on request
  • Pneumatically actuated normally closed valve
  • Easy refill
  • Optimized for fast maintenance
  • Robust heater design
  • Water-cooled assembly
  • Option for carrier gas version

 

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