Industrial MBE Sources

MBE, Molecular Beam Epitaxy System

Dr. Eberl MBE-Komponenten GmbH, Germany

Home > Products > 진공증착장비 (Vacuum Deposition System) > MBE System, Dr. Eberl MBE-Komponenten > MBE, Molecular Beam Epitaxy System

Trusted expertise since 1990

The product range and quality of Dr. Eberl MBE-Komponenten GmbH benefit from many years of active research experience of its team members.

We now look back on about 35 years of development and manufacture of complex systems and components for multiple tasks in the applied research and production of compound semiconductor materials. Each product is assembled and carefully tested in-house by our Deposition experts.

Equipment

PEZ-G Production Scale CIGS Evaporation Source

Large capacity up to 55 kg Cu
Very high flow rate up to 220 g/h for Cu
Long lifetime
Designed for easy maintenance
Proprietary encapsulation of heater and shielding
Simple ingot handling
High material efficiency through beam shaping insert
Encapsulated thermocouple
Pyrometeric temperature control option
Well proven in the field

Data Sheet

LES Production Scale Linear Evaporation Source

**LES**: Linear evaporation source for industrial applications

Large capacity up to 6000 cm³
High flow rate
Long lifetime
Propriatary encapsulation of heater and inner shielding
Excellent homogeneity due to beam shaping nozzle design
Encapsulated thermocouple
Evaporation zones up to 220 cm width

PVSS Production Scale Valved Selenium and Sulfur Source

PVSS 320-9600 for industrial applications

Reservoir Volume 9600 cm³, larger volume on request
Pneumatically actuated normally closed valve
Easy refill
Optimized for fast maintenance
Robust heater design
Water-cooled assembly
Option for carrier gas version

MBE Systems OCTOPLUS 350 - MBE system for 10x10 mm² - 2 inch samples with up to 8 ports for effusion cells Compact III/V, II/VI or other material MBE system Compact and versatile MBE system for R&D Appli

0 1,097

MBE Systems OCTOPLUS 500 - MBE system for up to 4 inch samples with up to 12 ports for effusion cells III/V, II/VI and other materials MBE system State-of-the-art MBE system for research and production

0 932

Oxide MBE Systems OCTOPLUS-O 350 The OCTOPLUS-O 350 MBE system features flexible differential pumping that allows depositing oxide la

0 991

Oxide MBE Systems OCTOPLUS-O 600 The OCTOPLUS-O 600 MBE system features flexible differential pumping options that allows depositing

0 1,035

PVD Systems PVD 350 - PVD system for 100 mm wafers Deposition chamber of an Organic Deposition System Wafer-scale PVD system Research PVD system with

0 930

PVD Systems PVD 550 - PVD system for 300 mm wafers Wafer-scale PVD system Deposition chamber of a CuInGaSe R&D System Compact and versatile researc

0 1,033

Equipment R&D Sources for Thin Film / CIGS / CZTS / CdTe R&D Sources for Thin Film / CIGS / CZTS / CdTe PEZ Production Effusion Cell PEZ 63-160-60 Produc

0 1,010

Equipment R&D Systems for Thin Film CIGS, CZTS or CdTe Solar Cell Thin Film CIGS, CZTS or CdTe Solar Cell Systems OCTOPLUS 500 Deposition chamber of a CIGS R&D Sy

0 986

Equipment Industrial MBE Sources Industrial MBE Sources PEZ-G Production Scale CIGS Evaporation Source PEZ-G Production Scale CIGS Ev

0 978

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