Shutter Accessories
S Shutter
- Rotary and linear motion
- Soft-acting shutter operation
- Fully UHV compatible
- Molybdenum shutter rod
- Tantalum shutter plate
- Special shutter liners as PBN, PG, Si
- Easy to mount on cells and shrouds
RSM Soft-acting Rotary Shutter Module
- Soft-acting rotary motion mechanism
- Shutter action time 0.2 sec (open-close)
- Automated shutter rotation with SCU
- Use with mini rotary feedthrough
- Feedthrough UHV compatible and bakeable up to 300°C
LSM Soft-acting Linear Shutter Module
- Soft-acting linear motion mechanism
- Shutter action time 0.2 sec (open-close)
- Magnetically coupled feedthrough
- Feedthrough on DN40 CF flange
- 30 to 100 mm linear travel
- Feedthrough UHV compatible and bakeable up to 300°C
RPM Rotary Pneumatic Shutter Module
- Rotary motion mechanism
- Shutter action times as fast as 250 ms (open-close)
- Adjustable shutter speed
- Option V: Endposition sensor and pneumatic switching valve
- Automated shutter rotation with SCU
- Use with mini rotary feedthrough
FSH Viewport Shutter
- Compatible with all UHV systems
- Double-sided CF flange
- Flange sizes DN63CF, DN100CF
- Right-angle swing type shutter
- Perfect view into UHV chamber due to 90° shutter opening
- Actuated with rotary feedthrough
- Magnetically coupled rotary feedthrough
- Two different shutter blade design options
- Bakeable up to 250°C
SCU Shutter Control Unit
- Soft-acting shutter control
- Manual or remote operation
- Suitable for all our shutter modules
- Modular design
- 19" rack system compatible
MSCU Multi-position Shutter Control Unit
- Soft-acting shutter control for Dual/Quad Cluster Sources
- Manual or remote operation
- suitable for DCS and QCS sources
- wide range input 90-230V AC
- 19" rack system compatible
