PSE WAFER TESTING PROBE STATION

Thermal Properties Analyzer

Thermal conductivity (Lambda), Ash fusion, Thermal screening

Microscopic Hot/Cold Stage, Wafer chuck, Thermal plate, Thermal probe station

Home > Products > 열물성분석기 (열전도도, 회융점, Tm, Hot/cold stage) > Thermal Probe Station

Analytical Probe Station

Compatible with high magnification metallographic microscope, with fine tuned movement
All purpose use for academic and industry laboratory research
Up to 12 inch wafer testing with 1um electrodes / PAD probes
Precision linear screw drives with zero back lash
LD/LED/PD Light intensity / wavelength testing
IV/CV Characteristic testing of materials / devices
High frequency characteristic device testing up to 300GHz

SPECIFICATIONS

Model		SE-4	SE-6	SE-8	SE-12
Dimensions		580mm x 620mm x 730mm	640mm x 700mm x 730mm	660mm x 660mm x 700mm	1030mm x 820mm x 730mm
Weight		70 kg	80 kg	85 kg	180 kg
Power		220V, 50 - 60 Hz
Chuck	Size & Rotation	4" & 360°	6" & 360°	8" & 360°	12" & 360°
	XY Range	4" x 4"	6" x 6"	8" x 8"	12" x 12"
	Z Range	6 mm (fast switching) / 6 mm (fine tuning)
	Resolution	10 μm
	Sample fixed mode	Vacuum adsorption
	Electrical design	Electrical floating with banana plug adapters, can be used as backside electrode
Platen	U Shape	6 micropositioners	8 micropositioners	10 micropositioners	12 micropositioners
Microscope	Moving range	360°, 50.8 mm (2")
	Magnification	16 - 100X standard, 200X optional
	CCD Pixel	50W (analog) / 200W (digital) / 500W (digital)
Micropositioning	XYZ Range	8 mm x 8 mm x 8 mm / 12 mm x 12 mm x 12 mm
	Mechanical resolution	10 μm, 2 μm, 0.7 μm, 0.1 μm
	Current leakage accuracy	10 pA, 100 fA
	Cable connectors	Banana head / Alligator clip / Coaxial / Triaxial
Optional Accessories		Microscope tilt mechanism	Hot chuck	Coaxial / Triaxial chuck	Low current / capacitance test
		Pneumatic lift mechanism	Shielding box	Vertical fine adjustment	Integral sphere integration
		Laser cutting and repairing	Special adapter	Rotation fine adjustment	Fixture for fiber optic coupler test
		Probe clamp	Vibration free table	Light intensity / wavelength testing	Fixture for PCB/IC test
		Dark field/DIC/Normaski test/light intensity/wavelength test interface accessory	Gold-plated chuck	RF testing accessories	Active probe
		Liquid crystal analysis package	High voltage measurement package	High current measurement package
Application		IC / LD / LED / PD / PCB / Packaged device / RF testing

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Thermal Properties Analyzer

SPECIFICATIONS

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