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Thermal Properties Analyzer

Thermal conductivity (Lambda), Ash fusion, Thermal screening

Microscopic Hot/Cold Stage, Wafer chuck, Thermal plate, Thermal probe station

PSE WAFER TESTING PROBE STATION


  • Compatible with high magnification metallographic microscope, with fine tuned movement
  • All purpose use for academic and industry laboratory research
  • Up to 12 inch wafer testing with 1um electrodes / PAD probes
  • Precision linear screw drives with zero back lash
  • LD/LED/PD Light intensity / wavelength testing
  • IV/CV Characteristic testing of materials / devices
  • High frequency characteristic device testing up to 300GHz

 

SPECIFICATIONS

Model

SE-4

SE-6

SE-8

SE-12

Dimensions

580mm x 620mm x 730mm

640mm x 700mm x 730mm

660mm x 660mm x 700mm

1030mm x 820mm x 730mm

Weight

70 kg

80 kg

85 kg

180 kg

Power

220V, 50 - 60 Hz

Chuck

Size & Rotation

4" & 360°

6" & 360°

8" & 360°

12" & 360°

XY Range

4" x 4"

6" x 6"

8" x 8"

12" x 12"

Z Range

6 mm (fast switching) / 6 mm (fine tuning)

Resolution

10 μm

Sample fixed mode

Vacuum adsorption

Electrical design

Electrical floating with banana plug adapters, can be used as backside electrode

Platen

U Shape

6 micropositioners

8 micropositioners

10 micropositioners

12 micropositioners

Microscope

Moving range

360°, 50.8 mm (2")

Magnification

16 - 100X standard, 200X optional

CCD Pixel

50W (analog) / 200W (digital) / 500W (digital)

Micropositioning

XYZ Range

8 mm x 8 mm x 8 mm / 12 mm x 12 mm x 12 mm

Mechanical resolution

10 μm, 2 μm, 0.7 μm, 0.1 μm

Current leakage accuracy

10 pA, 100 fA

Cable connectors

Banana head / Alligator clip / Coaxial / Triaxial

Optional Accessories

Microscope tilt mechanism

Hot chuck

Coaxial / Triaxial chuck

Low current / capacitance test

Pneumatic lift mechanism

Shielding box

Vertical fine adjustment

Integral sphere integration

Laser cutting and repairing

Special adapter

Rotation fine adjustment

Fixture for fiber optic coupler test

Probe clamp

Vibration free table

Light intensity / wavelength testing

Fixture for PCB/IC test

Dark field/DIC/Normaski test/light intensity/wavelength test interface accessory

Gold-plated chuck

RF testing accessories

Active probe

Liquid crystal analysis package

High voltage measurement package

High current measurement package

 

Application

IC / LD / LED / PD / PCB / Packaged device / RF testing

PSE WAFER TESTING PROBE STATION


 

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