- Stable structure with quick-lifted and fine-tuned Platen
- Suitable for probe card installation and usage
- Compatible with high magnification metallographic microscope
- Up to 12 inch wafer testing
- Precision linear screw drives with zero back lash
- Comfortable large handle
- Internal circuit / electrode / PAD probe
- LD / LED / PD Light intensity / wavelength testing
- IV / CV Characteristic testing of materials / devices
- High frequency characteristic device testing up to 300GHz
SPECIFICATIONS
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Model |
SH-6 |
SH-8 |
SH-12 |
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Dimensions |
820mm x 720mm x 890mm |
960mm x 850mm x 900mm |
1300mm x 920mm x 920mm |
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Weight |
170 kg |
230 kg |
300 kg |
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Power |
220V, 50 - 60 Hz |
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Chuck |
Size & Rotation |
6" & 360° |
8" & 360° |
12" & 360° |
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XY Range |
6" x 6" |
8" x 8" |
12" x 12" |
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Resolution |
1 μm |
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Sample fixed mode |
Vacuum adsorption |
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Electrical design |
Electrical floating with banana plug adapters, can be used as backside electrode |
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Platen |
U Shape |
6 micropositioners |
8 micropositioners |
12 micropositioners |
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Moving range & adjustment mode |
Platen can be quickly lifted up and down 6mm for fast probe tip separation Platen can be fine tuned up and down 25 mm precisely with 1 μm resolution |
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Microscope |
XY Travel range |
2" x 2", 50.8 mm |
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Moving resolution |
1 μm |
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Switching object lens |
Microscope tilting 30° manually by lever |
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Magnification |
20 - 4000X |
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Lens specification |
Eyepiece: 10X, Objective lens: 5X, 10X, 20X, 50X, 100X (optional) |
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CCD Pixel |
50W (analog) / 200W (digital) / 500W (digital) |
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Micropositioning |
XYZ Range |
8 mm x 8 mm x 8 mm or 12 mm x 12 mm x 12 mm |
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Mechanical resolution |
10 μm, 2 μm, 0.7 μm, 0.1 μm |
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Current leakage accuracy |
10 pA / 100fA (with shielding box) |
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Cable connectors |
Banana head / Alligator clip / Coaxial / Triaxial |
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Optional Accessories |
Chuck quick roll out mechanism |
Coaxial / Triaxial chuck |
Low current / capacitance test |
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Shielding box |
Vertical fine adjustment |
Integral sphere integration |
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Special adapter |
Rotation fine adjustment |
Fixture for fiber optic coupler test |
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Vibration free table |
Light intensity / wavelength testing |
Fixture for PCB/IC test |
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Gold-plated chuck |
RF testing accessories |
Active probe |
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Microscope tilting mechanism |
Microscope pneumatic lifting mechanism |
Laser repair with cutting ablation and welding function |
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Probe clamp |
Dark field/DIC/Normarski test/light intensity/wavelength test |
IC hotspot detection by LC |
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High voltage measurement |
High current measurement |
High/low temperature chuck |
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Application |
Wafer test, photoelectric device test, PCB/IC test, RF test, high voltage and high current measurements |
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