- Compact plate for Ellipsometry applications
- 70° incident & emergent light angles
- -190°C to 600°C with liquid nitrogen cooling option
- 28 mm × 30 mm sample area
- Gas-tight chamber
Description
The HCP621G-ELP gas tight plate is designed for ellipsometry applications where both thermal and atmospheric control is critical. Using a silver heating and cooling block, this plate provides a wide temperature range with precise thermal uniformity. The gas tight chamber provides a closed chamber to eliminate oxidation, aid in humidity studies, or conserve expensive reaction gasses.
Thermal Features
|
emperature Control |
mK2000 with programmable precision switching PID method |
|
Thermal Block |
Silver |
|
Sample Thermal Cover |
Optional removable Inner sample cover with additional window |
|
Temperature Minimum |
-190°C (with optional liquid N2 cooling) |
|
Temperature Maximum |
600°C |
|
Temperature Sensor |
100 Ω Platinum RTD |
|
Maximum Heating Rate |
+150°C per minute at 100°C |
|
Maximum Cooling Rate |
-50°C per minute at 100°C |
|
Minimum Heating and Cooling Rate |
±0.01°C per minute |
|
Temperature Resolution |
0.01°C |
|
Temperature Stability |
±0.05°C (above 25°C), ±0.1°C (below 25°C) |
|
Power supply |
Universal power input |
|
Software |
Windows compatible software to record and export temperature-time data; remotely control system via VCP connection (Virtual Comm Port) |
Optical Features
|
Optical access |
Reflection capability only |
|
Optical windows |
Removable and exchangeable windows permit full-spectrum transparency |
|
Minimum Objective Working Distance |
13.2 mm |
|
Top Window |
Ø27 mm |
|
Incident light angle |
70.0° from normal |
|
Emergent light angle |
70.0° from normal |
|
Window Defrost |
Integrated external window defrost |
Structural Features
|
Sample Area |
28 mm x 30 mm |
|
Chamber Height |
4.3 mm |
|
Atmosphere Control |
Sealed chamber with gas purging capability to control humidity, condensation, and oxidation |
|
Frame Cooling |
Integrated frame cooling with optional chiller system |
|
Mounting |
Horizontal capability |
|
Frame Dimensions |
97 mm x 84 mm x 36.5 mm |
|
Weight |
500 g |
