| THE HEX SERIES |
Chamber material to suit your research
Although we are strong believers in the benefits of aluminium as the material of choice for a PVD chamber, we realise that there are some benefits to utilising stainless steel chambers:
- Enhanced chemical and corrosion resistance
- Higher thermal stability
- Increased durability
- Potential to bake out
KORVUS TECHNOLOGY
Different material, same modularity
The HEX Steel is available for both the HEX and HEX-L variants and offers exactly the same modularity as the aluminium-based systems.
Each panel is sealed via an o-ring and is detachable. The only significant difference is the securing of the chamber to the electronics rack or base stand due to its increased weight and higher safety concerns. This means that the HEX Steel cannot be mounted as a benchtop system and must remain mounted to the chamber control rack.
The integrated rack allows for neater cable management with all water lines, power cables and shutter controllers remaining within the rack width and general footprint.
If you believe that your research would benefit from a modular, steel deposition system, please contact us now.
