HPT-100 & HPT-200

HPT-100과 HPT-200은 마이크로프로세서 제어 방식의 벤치탑 플라즈마 처리 시스템으로, 폴리머, 금속, 유리, 세라믹 등 다양한 소재의 표면 활성화, 클리닝 및 표면개질에 이상적인 장비입니다.

고정 가스 또는 싱글 가스 , 이중 가스 주입 버전과 온보드 가스믹싱 매니폴드를 갖춘 HPT-100/200 시스템은 공기, 산소, 수소, 아르곤, 질소 등 다양한 가스를 사용하여 최적화된 표면처리를 수행합니다.

옵션인 vapor inlet을 톻해 액체 전구체까지 사용할 수 있으며, 부식방지 버전을 다음과 같은 특정 재료 처리에 적용할 수 있어 선택의 폭이 더욱 넓습니다;

• Plasma cleaning
• Plasma surface activation to improve adhesion
• Functional plasma coatings
• Plasma etching
• PDMS & microfluidic devices
• PEEK & other engineering polymers
• PTFE
• Metals
• Ceramics
• Glass & optical devices

PROCESS RESULTS

TFT Colour touchscreen

Each system is supplied with a 5.7-inch colour touchscreen which provides a rich, user-friendly interface. Variables such as gas flow rate, pressure, power level and plasma processing time can be freely set and then stored to produce a fully interlocked process cycle from a single keypress. A handy status display and end of process audible alarm informs the user of every step in the process.

PLASMA ENVIRONMENT

Vacuum chamber & power

The HPT-100 system features a 100mm diameter plasma process chamber in stainless steel with vacuum compatible materials throughout.

The HPT-200 features a larger capacity 150mm diameter plasma process chamber to accomodate more samples or larger samples.

Henniker's proprietary, high stability HPS plasma generator is continuously variable over the entire 0-100W/0-200W power range rather than being limited to discreet levels, delivering much finer control when processing delicate materials.

BENEFITS

Versatility

Each system has a range of gas inlet options to suit budget and application; fixed, single MFC, dual MFC and vapour delivery.  The units can be prepared so that either option can be added at a later time if required, ensuring that future requirements can be accommodated without expensive reconfiguration.

Repeatable and Reliable

With precision flow control and integrated pressure gauge, the 100 & 200 models deliver unmatched reliability & repeatability by removing common errors in gas flow and gas type settings which will be familiar to users of equivalent equipment that utilise manual needle valves.

BENEFITS

SPECFICATION