- Compatible with high magnification metallographic microscope, with fine tuned movement
- All purpose use for academic and industry laboratory research
- Up to 12 inch wafer testing with 1um electrodes / PAD probes
- Precision linear screw drives with zero back lash
- LD/LED/PD Light intensity / wavelength testing
- IV/CV Characteristic testing of materials / devices
- High frequency characteristic device testing up to 300GHz
SPECIFICATIONS
| Model |
SE-4 |
SE-6 |
SE-8 |
SE-12 |
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Dimensions |
580mm x 620mm x 730mm |
640mm x 700mm x 730mm |
660mm x 660mm x 700mm |
1030mm x 820mm x 730mm |
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Weight |
70 kg |
80 kg |
85 kg |
180 kg |
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|
Power |
220V, 50 - 60 Hz |
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Chuck |
Size & Rotation |
4" & 360° |
6" & 360° |
8" & 360° |
12" & 360° |
|
XY Range |
4" x 4" |
6" x 6" |
8" x 8" |
12" x 12" |
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Z Range |
6 mm (fast switching) / 6 mm (fine tuning) |
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Resolution |
10 μm |
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Sample fixed mode |
Vacuum adsorption |
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Electrical design |
Electrical floating with banana plug adapters, can be used as backside electrode |
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Platen |
U Shape |
6 micropositioners |
8 micropositioners |
10 micropositioners |
12 micropositioners |
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Microscope |
Moving range |
360°, 50.8 mm (2") |
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Magnification |
16 - 100X standard, 200X optional |
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CCD Pixel |
50W (analog) / 200W (digital) / 500W (digital) |
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Micropositioning |
XYZ Range |
8 mm x 8 mm x 8 mm / 12 mm x 12 mm x 12 mm |
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Mechanical resolution |
10 μm, 2 μm, 0.7 μm, 0.1 μm |
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Current leakage accuracy |
10 pA, 100 fA |
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Cable connectors |
Banana head / Alligator clip / Coaxial / Triaxial |
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Optional Accessories |
Microscope tilt mechanism |
Hot chuck |
Coaxial / Triaxial chuck |
Low current / capacitance test |
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Pneumatic lift mechanism |
Shielding box |
Vertical fine adjustment |
Integral sphere integration |
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Laser cutting and repairing |
Special adapter |
Rotation fine adjustment |
Fixture for fiber optic coupler test |
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Probe clamp |
Vibration free table |
Light intensity / wavelength testing |
Fixture for PCB/IC test |
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Dark field/DIC/Normaski test/light intensity/wavelength test interface accessory |
Gold-plated chuck |
RF testing accessories |
Active probe |
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Liquid crystal analysis package |
High voltage measurement package |
High current measurement package |
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Application |
IC / LD / LED / PD / PCB / Packaged device / RF testing |
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