- Compact & affordable design for research laboratory
- Up to 6 inch wafer testing with 50um electrodes / PAD probes
- Precision linear screw drives with zero back lash
- LD/LED/PD light intensity / wavelength testing
- IV/CV characteristic materials and device testing
SPECIFICATIONS
| Model |
SM-4 |
SM-6 MINI |
SM-6 |
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Dimensions |
400mm x 400mm x 550mm |
400mm x 400mm x 550mm |
680mm x 530mm x 550mm |
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Weight |
30 kg |
35 kg |
40 kg |
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Power |
220V, 50 - 60 Hz |
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Chuck |
Size & Rotation |
4" & 360° |
6" & 360° |
6" & 360V |
|
XY Range |
4" |
4" |
6" |
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Resolution |
10 μm |
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Sample fixed mode |
Vacuum adsorption |
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Electrical design |
Electrical floating with banana plug adapters, can be used as backside electrode |
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Platen |
U Shape |
6 micropositioners |
8 micropositioners |
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Microscope |
Moving range |
360°, 50.8 mm |
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Magnification |
16 - 100X standard, 200X optional |
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CCD Pixel |
50W (analog) / 200W (digital) / 500W (digital) |
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Micropositioning |
XYZ Range |
12 mm x 12 mm x 12 mm |
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Mechanical resolution |
10 μm, 2 μm, 0.7 μm |
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Current leakage accuracy |
10 pA, 100 fA |
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Cable connectors |
Banana head / Alligator clip / Coaxial / Triaxial |
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Optional Accessories |
Hot chuck |
Coaxial / Triaxial chuck |
Low current / capacitance testing |
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Shielding box |
Vertical fine adjustment |
Integral sphere integration |
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Special adapter |
Rotation fine adjustment |
Fixture for fiber optic coupler testing |
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Vibration free table |
Light intensity / wavelength testing |
Fixture for PCB/IC testing |
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Gold-plated chuck |
RF testing accessories |
Active probe |
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Application |
IC / LD / LED / PD /PCB/ Packaged device / RF testing |
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