HCP421V-MPS Vacuum Chamber Probe Station
- Tabletop design with small footprint integrates with modern instruments and benches
 - -190°C - 400°C (600°C option available, see HCP621G-MPS)
 - Fits 10 mm - 50 mm samples and wafers
 - Sealed chamber with gas purging and/or vacuum capabilities
 - 4 independent electrical probes with remote mechanical positioning
 - Up to 7 probers available
 
STRUCTURAL FEATURES
| 
			 Sample Area  | 
			
			 Fits φ10 mm-φ50 mm wafers and devices (standard)  | 
		
| 
			 Chamber Height  | 
			
			 8mm  | 
		
| 
			 Atmosphere Control  | 
			
			 Gas purging or vacuum capability to control humidity, condensation, and oxidation  | 
		
| 
			 Frame Cooling  | 
			
			 Integrated frame cooling with optional chiller system  | 
		
| 
			 Frame Dimensions  | 
			
			 300 mm x 300 mm x 40 mm  | 
		
| 
			 Weight  | 
			
			 4000g  | 
		
OPTICAL FEATURES
| 
			 Optical Access  | 
			
			 Reflection (transmission option available)  | 
		
| 
			 Optical Windows  | 
			
			 Removable and exchangeable windows permit full-spectrum transparency  | 
		
| 
			 Minimum Objective Working Distance  | 
			
			 12 mm  | 
		
| 
			 Top Window  | 
			
			 50 mm diameter  | 
		
| 
			 Top Viewing Angle  | 
			
			 ±50° from normal  | 
		
| 
			 Window Defrost  | 
			
			 Integrated external window defrost  | 
		
THERMAL FEATURES
| 
			 Temperature Control  | 
			
			 mK2000 with programmable precision LVDC PID method to minimize electrical noise  | 
		
| 
			 Thermal Block  | 
			
			 Silver  | 
		
| 
			 Temperature Minimum  | 
			
			 -190°C (with optional liquid N2 cooling)  | 
		
| 
			 Temperature Maximum  | 
			
			 400°C for vacuum version (600°C for gas tight version)  | 
		
| 
			 Temperature Sensor  | 
			
			 100 Ω Platinum RTD  | 
		
| 
			 Temperature Resolution  | 
			
			 0.01°C (RTD)  | 
		
| 
			 Temperature Stability  | 
			
			 ±0.05°C (>25°C), ±0.1°C (<25°C)  | 
		
| 
			 Software  | 
			
			 Windows software to record and export temperature-time data  | 
		
ELECTRICAL FEATURES
| 
			 Electrical Probes  | 
			
			 Standard tungsten-rhenium DC probes with other probe options available  | 
		
| 
			 Probe Positioning  | 
			
			 XYZ micro positioners remotely manipulate probes within sealed sample chambers with 10um resolution  | 
		
| 
			 Connectors  | 
			
			 BNC connector (default), or triaxial BNC connectors  | 
		
| 
			 Sample Surface  | 
			
			 Grounded (default), floating, or triaxial options  | 
		
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