Moorfield have been working with the Edwards E306 system for more than 2 decades.
Techniques:
Thermal evaporation, Magnetron sputtering, E-Beam evaporation
Typical configurations
Edwards E306 Thermal
We can provide standard Edwards layouts available including 1, 2 or 3 boat configurations with interspaced shielding. 4 boat TE4 with optional co-deposition mode. Replacement thermal control systems either console or 19″ rack-mount based.
Edwards E306 Sputtering
Standard Edwards layouts available including 1, 2 or 3 head configurations with interspaced shielding. RF, DC and pulsed DC supplies. Sample bias stages. Replacement quartz crystal control systems for PID loop deposition control.
Edwards E306 E-beam
Repair and refurbishment of standard Edwards EBE1 and EBE3 configurations available. New and upgraded power supplies. Heated/cooled sample stages. Replacement quartz crystal control systems for PID loop deposition control. Retrofitted 4 or 6 hearth e-beam sources with manual or auto indexation.
Edwards E306 Hybrid
Moorfield specialise in E306 multi-technique system configurations. Examples (of many possible configurations) include: E-beam with thermal evaporation, low-temperature with standard thermal evaporation, magnetron sputtering with thermal evaporation, sputtering with e-beam. The chamber is small, but it can be done!
Edwards E306 Control Options
Safety interlock upgrades, gauging upgrades, PLC control upgrades and deposition control upgrades using quartz crystal sensors.
Moorfield offer a full range of service, maintenance and support packages for Edwards E306 units. More than 2 decades experience!
Our Edwards E306 support is provided in a variety of formats:
- Emergency call-out service
- Annual maintenance packages
- System commissioning/decommissioning
- Contact us to discuss your requirements
