| Legacy | ATC-T SERIES THERMAL EVAPORATION SYSTEMS
                                                                            file | YEONJIN | 0 | 2152 | 2020-12-17 | ATC-T SERIES THERMAL EVAPORATION SYSTEMS
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                                                                                                                                        | Legacy | ATC-E SERIES E-BEAM EVAPORATION SYSTEMS
                                                                            file | YEONJIN | 0 | 2391 | 2020-12-17 | ATC-E SERIES E-BEAM EVAPORATION SYSTEMS
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                                                                                                                                        |  | ATC B-SERIES BATCH COATING SYSTEMS
                                                                            file | YEONJIN | 0 | 1969 | 2020-12-16 | ATC B-SERIES BATCH COATING SYSTEMS
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                                                                                                                                        |  | ATC FLAGSHIP SERIES SPUTTERING SYSTEMS
                                                                            file | YEONJIN | 0 | 2396 | 2020-12-16 | ATC FLAGSHIP SERIES SPUTTERING SYSTEMS
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                                                                                                                                        |  | ATC ORION SERIES SPUTTERING SYSTEMS
                                                                            file | YEONJIN | 0 | 2175 | 2020-12-15 | ATC ORION SERIES SPUTTERING SYSTEMS
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                                                                                                                                        | Legacy | ATC UHV Dual Chambers
                                                                            file | YEONJIN | 0 | 1503 | 2020-12-14 | ATC UHV Dual Chambers
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                                                                                                                                        | Legacy | ATC Dual Chamber with Common Cassette Load-lock
                                                                            file | YEONJIN | 0 | 1592 | 2020-12-14 | ATC Dual Chamber with Common Cassette Load-lock
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                                                                                                                                        | Legacy | ATC Dual Chamber - Sputtering / Pulsed Laser Deposition (PLD)
                                                                            file | YEONJIN | 0 | 1613 | 2020-12-14 | ATC Dual Chamber - Sputtering / Pulsed Laser Deposition (PLD)
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                                                                                                                                        | Legacy | ATC -MC-HY Multi-Chamber Hybrid Deposition Tool with UHV Transfer Tube & Glovebox Interface
                                                                            file | YEONJIN | 0 | 1393 | 2020-12-14 | ATC -MC-HY Multi-Chamber Hybrid Deposition Tool with UHV Transfer Tube & Glovebox Interface
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                                                                                                                                        | Legacy | Dual ATC-Orion UHV with Common Load-Lock 
                                                                            file | YEONJIN | 0 | 1356 | 2020-12-14 | Dual ATC-Orion UHV with Common Load-Lock 
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                                                                                                                                        | Legacy | ATC 1800-HY Hybrid System
                                                                            file | YEONJIN | 0 | 1414 | 2020-12-14 | ATC 1800-HY Hybrid System
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                                                                                                                                        | Legacy | ATC 2030-HY Hybrid System
                                                                            file | YEONJIN | 0 | 1407 | 2020-12-14 | ATC 2030-HY Hybrid System
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