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Accessories and Consumables

For maintenance and repair service

Sputtering Power Supplies

HIPIMS GENERATORS FOR IONIZED MAGNETRON SPUTTERING

YEONJIN 2021-01-09 22:48:25 920

HiPIMS Generators

  • 10 kW, 1 MW peak power
  • 1 kV, 1 kA, 1-500 Hz pulse frequency
  • 400 VAC 3 phase input, 50/60 Hz
  • RS-232, RS-485, analog interface
  • Active front panel control
  • DC unit, high power pulsar and cable matching unit