Sputtering Power Supplies
RF GENERATORS & MATCHING NETWORKS FOR MAGNETRON SPUTTERING
RF Generators / Matching Networks
- 100 W for RF bias and small sources
- 300 W, 600 W and 1000W for RF magnetron deposition
- Integral generator/matching network controller - minimal rack space
- Software specifically for magnetron sputtering - intuitive operation
- Programmable power limits
- Cables included with either "N", "HN" or "7/16 DIN" coaxial connectors