A batch ALD system for R&D and small-scale production
SC Qube Series
SC Qube Series
⎯
The SC Qube is an ALD batch system for R & D and small scale production to coat different kinds and sizes of 3D parts.
The patent-pending scalable chamber from Swiss Cluster can be configured to fit to all types of 3D parts and coating material requirements to deliver exceptional coating homogeneity at unparalleled process speeds.
Our single chamber approach makes it easy to configure the chamber, integrate to a cleanroom or to a glovebox unit with an easy front loading of 3D parts with custom-made holders.
Technical Specifications
⎯
|
Chamber dimensions |
Adapted to your 3D parts and coating material 3 L – 50L |
|
Loading |
Front loading with guided door |
|
Process Temperatures |
Up to 500 °C |
|
Precursors |
Up to 8 gas sources with 6 individual inlets |
|
Standard Materials |
Al₂O₃, ZnO, SiO₂, TiO₂, Y₂O₃, Nitrides Novel bubbler delivery system optimised for low vapour pressure precursors 500 nm Al₂O₃ < 1% 1-sigma uniformity |
|
Substrate Sizes |
Multiple substrates or 3D objects of various shapes and sizes Dimensions of chamber and holder are optimally adapted to the parts and coating material |
