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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Vanadium Oxide Sputtering Target, V2O3

 

Vanadium Oxide Sputtering

Target Description

 

Vanadium Oxide Sputtering Target is a specialized material used in the sputter deposition process. Sputter deposition is a technique employed in the production of thin films for various applications in electronics, optics, and coatings.

The sputtering target is a high-purity form of V2O3, designed to provide a controlled and precise source of vanadium(III) oxide during the thin-film deposition process.

 

Vanadium Oxide Sputtering Target Specifications

Compound Formula

V2O3

Molecular Weight

149.88

Appearance

Black Target

Melting Point

1940℃

Density (g/cm3)

4.339

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″

 

Thick: 0.125″, 0.250″

 

Vanadium Oxide Sputtering Target Handling Notes

  1. Indium bonding is recommended for the Vanadium Oxide Sputtering Target, due to some of its characteristics not amenable to sputtering like brittleness, low thermal conductivity, etc.
  2. This material has a low thermal conductivity and is susceptible to thermal shock.

 

Vanadium Oxide Sputtering Target Application

Vanadium Oxide Sputtering Target is used in the fabrication of electronic devices and components.

 

Vanadium Oxide Sputtering Target Packaging

Our Vanadium Oxide Sputtering Target is carefully handled during storage and transportation to preserve the quality of our products in their original condition.

 

 

 

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