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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Yttrium Iron Garnet PLD Target, Y3Fe5O12, YIG


 

Yttrium Iron Garnet PLD

Target Description

 

Yttrium Iron Garnet PLD Target is a specialized material used in the sputter deposition process. Sputter deposition is a widely used technique in the production of thin films for various applications in electronics, magnetics, and optics.

YIG is known for its unique magnetic and optical properties, making it valuable in various applications. The sputter deposition process involves bombarding the target material (Yttrium Iron Garnet Sputtering Target) with high-energy ions in a vacuum chamber. This causes atoms or particles from the target material to be ejected, and these ejected particles then deposit onto a substrate, forming a thin film.

 

Yttrium Iron Garnet PLD Target Specifications

Compound Formula

Y3Fe5O12

Molecular Weight

737.94

Appearance

Green target

Melting Point

N/A

Density (g/cm3)

5.11

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″

 

Thick: 0.125″, 0.250″

 

Yttrium Iron Garnet PLD Target Handling Notes

  1. Indium bonding is recommended for Yttrium Iron Garnet PLD Target, due to some of its characteristics not amenable to sputtering like brittleness, low thermal conductivity, etc.
  2. This material has a low thermal conductivity, and is susceptible to thermal shock.

 

Yttrium Iron Garnet PLD Target Application

Yttrium Iron Garnet PLD Target is widely used in various applications in electronics, magnetics, and optics.

 

Yttrium Iron Garnet PLD Target Packaging

Our Yttrium Iron Garnet PLD Target is carefully handled during storage and transportation to preserve the quality of our products in their original condition.

 

 

 

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