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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

AZO Sputtering Target, Aluminum-doped Zinc Oxide


 

AZO Sputtering Target Description

 

 

AZO sputtering target, or aluminum-doped zinc oxide target, contains the element of Al, Zn and O.

Aluminum

Aluminum, or aluminium, is a chemical element derived from the alum name in Latin, and “alumen” stands for bitter salt. “Al” is the standard chemical symbol for aluminum. Aluminum films are often used as reflective coatings on telescopes, car headlights, mirrors, packaging and toys. The Aluminum target is widely used in the aerospace, automotive lighting, OLED and optical industries.

 

ZincZinc is a chemical element that originated in German as “zinc”; zinc is also considered that it be derived from Persian word “sing”, which means stone. “Zn” is the standard chemical symbol for zinc. Its atomic number in the periodic table is 30.

 

 

AZO Sputtering Target Specification

Material Type

Aluminum doped Zinc Oxide

Symbol

AZO

Appearance

Solid in various forms

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

 

AZO Sputtering Target Manufacturing Process

• Manufacturing – Cold pressed – Sintered, Elastomer bonded to the backing plate

• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment

 

AZO Sputtering Target Application

AZO sputtering target is used for thin film deposition, typically for fuel cell, decoration, semiconductor, display, LED and photovoltaic devices, glass coating, etc. Aluminum-doped zinc oxide was investigated for replacing ITO, e.g., in solar cells, due to the concern of indium shortage and increasing price.

 

AZO Sputtering Packing

Aluminum-doped zinc oxide sputtering target is clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

 

 

 

 

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