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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Barium Oxide Sputtering Target, BaO


 

 

Barium Oxide Sputtering Target Description

 

Barium oxide sputtering target is a type of oxide ceramic sputtering target composed of Barium and oxide.

Barium is a chemical element originated from the Greek ‘barys’, meaning heavy. It was first mentioned in 1772 and observed by W. Scheele. The isolation was later accomplished and announced by H. Davy. “Ba” is the canonical chemical symbol of barium. Its atomic number in the periodic table of elements is 56 with location at Period 6 and Group 2, belonging to the s-block. The relative atomic mass of barium is 137.327(7) Dalton, the number in the brackets indicating the uncertainty.

 

Manufacturing Process

 

• Manufacturing – Cold pressed – Sintered, Elastomer bonded to the backing plate

• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants, Protection during shipment.

 

Barium Oxide Sputtering Target Specification

Material Type

Barium Oxide

Symbol

BaO

Color/Appearance

White, Crystalline Solid

Melting Point

1,923°C

Sputter

RF, RF-R, DC

Type of Bond

Indium, Elastomer

Available Sizes

Dia.: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thick: 0.125″, 0.250″

 

Barium Oxide Sputtering Target Bonding Services

Indium Bonding and Elastomeric Target Bonding Service are available for the barium oxide sputtering target. Stanford Advanced Materials (SAM) is devoted to machining standard backing plates and working together with the Taiwan Bonding Company for providing bonding services.

Target Bonding Services

 

 

Barium Oxide Packing

Our barium oxide sputtering target is clearly tagged and labeled externally to ensure efficient identification and quality control. Great care is taken to avoid any damage which might be caused during storage or transportation.

 

 

 

 

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