High Purity IrO2 Sputter Targets for Thin-film Application

Iridium oxide is a blue-black solid. IrO2 is the only well-characterized oxide of iridium. The structure of IrO2 is similar to the TiO₂ rutile structure, featuring six-coordinate iridium and three-coordinate oxygen. There are several different methods for obtaining iridium oxide, which can be divided into two categories: modification and reactive deposition.

Iridium Oxide Sputtering Target Specification

Note: Due to its brittleness and reactivity during deposition, elastomer bonding is recommended for better thermal shock absorption.

Iridium Oxide Applications

Iridium oxide sputtering targets are widely used in:

• Microelectronic Devices – Passivation layers, barrier films

• Electrodes – Coatings for dimensionally stable anodes in chlor-alkali electrolysis, fuel cells, and electrochemical sensors

• Bioelectronics – Microelectrodes in electrophysiology and neural interfaces

• Photovoltaics & Displays – Transparent conductive oxides, antireflection coatings

• Catalysis & Energy – IrO₂ thin films as part of OER (oxygen evolution reaction) catalysts for PEM electrolyzers

Iridium Oxide Sputtering Target Bonding Services

SAM offers professional target bonding for high-temperature sputtering applications. For IrO₂, we recommend:

• Elastomer Bonding – Best for managing thermal expansion stress

• Indium Bonding – Optional if thermal cycling is controlled

• Available Backing Plates: Copper, Molybdenum, Stainless Steel

Iridium Oxide Packaging

All IrO₂ targets are:

• Vacuum-sealed in anti-static, cleanroom-grade packaging

• Labeled with batch number and COA (Certificate of Analysis)

• Shipped with foam protection inside impact-resistant containers