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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Ruthenium Oxide Sputtering Target, RuO2

 

 

Ruthenium Oxide Product Overview

 

 

 

Our high-purity Ruthenium Oxide Sputtering Targets, crafted from dark black RuO2, are essential for thin-film applications in electronics, optics, and energy storage. Known for its excellent electrical conductivity and stability under high temperatures, Ruthenium Oxide is ideal for demanding industrial applications.

 

Ruthenium Oxide Specifications

Chemical Formula

 RuO2

CAS Number

 12036-10-1

Purity

 Options from 99.9% to 99.999%

Molecular Weight

 133.07 g/mol

Appearance

 Solid, dark black

Melting Point

 1,200°C

Density

 6.97 g/cm³

Sputter

 RF, DC

Available Sizes

Diameter up to 14 inches, Thickness ≥ 1 mm; custom sizes available upon request.

 

Key Properties and Applications

Properties:

  • Conductivity: Ruthenium Oxide is known for its superb conductivity, making it suitable for electrode applications in various electronic devices.
  • High-Temperature Stability: Maintains performance under high temperatures, crucial for applications in high-temperature electronic devices.
  • Mechanical Strength: Offers excellent wear and corrosion resistance, enhancing the durability of coated components.

Applications:

  1. Electronic devices: Ruthenium Oxide Sputtering Targets play a key role in the preparation of electronic devices and are used to form conductive films such as electrodes and conductive layers. This is critical for making high-performance semiconductor devices, capacitors and other electronic components.
  2. Optical coatings: Due to their superior optical properties, Ruthenium Oxide Sputtering Targets are widely used to prepare optical coatings, including anti-reflective coatings and mirror coatings. The application of these coatings in optical components improves the performance of optical devices.
  3. Energy Storage: In the energy field, Ruthenium Oxide Sputtering Targets play a key role in the preparation of high-performance batteries such as supercapacitors and lithium-ion batteries. Its electrical conductivity and thermal stability make it a preferred material, improving battery performance and life.
  4. Sensor technology: Ruthenium Oxide is also used in sensor technology, especially at high temperatures and harsh environmental conditions, where its stability and conductive properties make it an ideal sensor material.
  5. High-temperature electronic devices: Due to their good thermal stability, Ruthenium Oxide Sputtering Targets perform well in preparing high-temperature electronic devices, meeting the needs of some special environments.

 

Customization and Technical Support

We provide customized sizing and composition based on your specifications and offer comprehensive support including target bonding services. Options for Indium and Elastomer bonding are available to enhance the target’s integration into your specific setup.

 

Frequently Asked Questions

Q1: What makes Ruthenium Oxide a preferred material for sputtering targets?
A1: Its excellent conductivity, thermal stability, and mechanical strength make it ideal for high-performance applications in electronics and energy storage.

Q2: Can I get Ruthenium Oxide Targets in custom dimensions for my specific application?
A2: Absolutely, we can customize the dimensions and shapes to meet the specific needs of your deposition systems and applications.

Q3: What are common applications of Ruthenium Oxide Sputtering Targets?
A3: They are widely used for producing electronic components, optical coatings, and electrodes for energy storage devices.

 

 

 

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