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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Lanthanum Calcium Manganese Oxide Target (LCMO)


 

LCMO Product Overview

 

Stanford Advanced Materials (SAM) introduces the Lanthanum Calcium Manganese Oxide Target (LCMO), a top-tier ceramic sputtering target engineered for superior thin film applications. Renowned for its exceptional performance in colossal magnetoresistance (CMR) and spintronics research, LCMO is the preferred choice for scientists and manufacturers developing advanced magnetic and electronic devices.

 

LCMO Product Description

 

The Lanthanum Calcium Manganese Oxide Target (LCMO) features a perovskite crystal structure, commonly represented by the formula La₁₋ₓCaₓMnO₃. In this structure, calcium partially replaces lanthanum, allowing precise adjustment of the material’s electronic and magnetic characteristics. LCMO is distinguished by its colossal magnetoresistance (CMR), a property where its electrical resistance undergoes significant changes when subjected to a magnetic field. This material exhibits strong interactions among its spin, charge, and lattice components, resulting in intricate phase transitions and highly adjustable conductivity. Additionally, LCMO displays ferromagnetic behavior at specific doping levels and temperatures, with its Curie temperature varying based on calcium concentration. Its thermal stability and uniform chemical composition make it ideal for high-temperature deposition techniques such as pulsed laser deposition (PLD) and RF magnetron sputtering. These attributes position LCMO as a leading material for both experimental and industrial applications that demand precise manipulation of magnetic and transport properties in thin films.

LCMO Properties

  • Material: LCMO
  • CAS No.: 123273-09-6
  • Purity: 99.9%
  • Shape: Planar Disc
  • Chemical Composition (%):
    • La₂O₃: ~35 mol%
    • CaO: ~15 mol%
    • MnO: ~50 mol%

 

Please note: Specifications are based on theoretical data. For customized requirements and detailed inquiries, contact us directly.

Size: Customizable

 

LCMO Applications

  • Colossal Magnetoresistance (CMR) Devices: Ideal for magnetic sensors, magnetic field detectors, and hard disk drives where resistance variation in response to magnetic fields is essential.
  • Spintronics: Perfect for spintronic devices that utilize electron spin alongside charge for enhanced computing and data storage solutions.
  • Magnetic Tunnel Junctions (MTJs): Utilized in MTJs, which are critical components in non-volatile memory technologies such as Magnetoresistive Random Access Memory (MRAM).
  • Catalysis: The perovskite structure of LCMO makes it suitable for catalytic applications, including fuel cells and as a support material for reactions involving oxygen and carbon monoxide.
  • High-Efficiency Magnetic Refrigeration: Explored for use in magnetic refrigeration systems due to its notable magnetocaloric effect.

 

LCMO Packaging

Our Lanthanum Calcium Manganese Oxide Targets are packaged meticulously to ensure their safety and integrity during transit and storage. Depending on the size, smaller targets are securely housed in polypropylene (PP) boxes, while larger ones are shipped in custom wooden crates. We emphasize customized packaging solutions and utilize appropriate cushioning materials to provide optimal protection.

Packaging Options:

  • Carton
  • Wooden Crate
  • Custom Packaging

 

Manufacturing Process

Manufacturing Workflow

 

Testing Methods

  1. Chemical Composition Analysis: Confirm material purity and composition using techniques like Glow Discharge Mass Spectrometry (GDMS) or X-ray Fluorescence (XRF).
  2. Mechanical Properties Testing: Evaluate tensile strength, yield strength, and elongation to determine material performance.
  3. Dimensional Inspection: Measure thickness, diameter, and other dimensions to ensure compliance with specified tolerances.
  4. Surface Quality Inspection: Identify defects such as scratches, cracks, or inclusions through visual and ultrasonic examinations.
  5. Hardness Testing: Assess material hardness to ensure uniformity and mechanical reliability.

 

Frequently Asked Questions

Q1: What are the primary applications of LCMO?
A1: LCMO is primarily utilized in thin-film deposition for spintronics, magnetoresistive sensors, and advanced memory devices like Magnetoresistive Random Access Memory (MRAM).

Q2: Why is LCMO preferred for spintronic applications?
A2: Its colossal magnetoresistance (CMR) property enables substantial changes in electrical resistance under magnetic fields, which is crucial for enhancing spintronic device performance.

Q3: Which deposition techniques are compatible with LCMO targets?
A3: LCMO targets are well-suited for pulsed laser deposition (PLD) and magnetron sputtering, the most commonly used methods for producing high-quality thin films.

 

Performance Comparison: LCMO vs. Competing Materials

Property

LCMO (Solid-State)

LCMO (Sol-Gel)

LSMO (La₀.₇Sr₀.₃MnO₃)

YBCO (YBa₂Cu₃O₇)

STO (SrTiO₃

Composition

Composition

La₀.₆₇Ca₀.₃₃MnO₃

La₀.₇Sr₀.₃MnO₃

YBa₂Cu₃O₇

SrTiO₃

Grain Size

Smaller grains, scattered boundaries

Enhanced crystal quality

0.5-2 μm

1-5 μm

0.5-2 μm

Sintering Method

Solid-State (SS)

Sol-Gel (SG)

Solid-State/Sol-Gel

Pulsed Laser Deposition

Solid-State

Crystal Structure

Polycrystalline

Polycrystalline

Perovskite

Orthorhombic

Cubic perovskite

Resistivity (Ω·cm)

Higher resistivity

Lower resistivity

Moderate resistivity

Superconducting (below Tc)

High resistivity

Key Applications

Infrared detectors, magnetic sensors

High-sensitivity IR detectors, magnetic sensors

Spintronics, magnetoresistive devices

Superconducting films, quantum devices

Substrates, dielectric layers

 

Raw Materials Information

Lanthanum (La)

Lanthanum is a soft, silvery-white, ductile metal classified among the rare earth elements. It is typically extracted from minerals such as monazite and bastnäsite. Renowned for its high melting point and excellent electrical conductivity, lanthanum forms stable oxide compounds. Common applications include catalysts, phosphors, and battery technologies like Nickel-Metal Hydride (NiMH) batteries. Additionally, lanthanum oxide is pivotal for high-temperature applications and solid oxide fuel cells (SOFCs), where it enhances device performance and stability.

 

Calcium (Ca)

Calcium is a silvery-white, moderately hard alkaline earth metal with an atomic number of 20 and an atomic weight of approximately 40.08. Highly reactive, especially with water and oxygen, calcium forms a protective oxide and hydroxide layer that prevents further corrosion. Essential in biological systems as a primary component of bones and teeth, calcium is also used in materials science as a reducing agent for metals like uranium and thorium. In thin film and ceramic applications, calcium aids in forming complex oxides with unique electrical and magnetic properties, such as in perovskite materials like LCMO (La₁₋ₓCaₓMnO₃).

 

Manganese (Mn)

Manganese is a transition metal with the atomic number 25, located in Group 7 of the periodic table. It is a hard, brittle, silver-gray metal that does not occur freely in nature but is found in minerals like pyrolusite (MnO₂). Manganese is vital for steel production, enhancing hardness, stiffness, and strength. It is also extensively used in battery manufacturing, ceramics, fertilizers, and electronic materials. In advanced materials and thin films, manganese is a key component in magnetic and oxide compounds such as Lanthanum Strontium Manganite (LSMO), which is utilized in spintronics, magnetic sensors, and memory devices due to its colossal magnetoresistance and other functional properties.

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