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Sputtering Targets

Different Shapes of Sputtering Targets

(주)연진에스텍은 Planar (Flat) TargetRotary (Cylindrical) Target, Circular (Disc)TargetRing Target 등 대부분의 증착 공정에 부합하는 다양한 형태의 스퍼터링 타겟을 제공하며, 특이한 요청 시 타겟 크기의 커스터마이즈가 가능합니다.

 

Key Features

  • High Purity & Performance: 일관된 증착 품질과 오염을 줄이도록 가공합니다.
  • Material Variety: 다양한 응용 분야의 요구 사항에 맞게 순수 금속, 합금, 세라믹 및 화합물로 제공됩니다.
  • Custom Manufacturing: 특정 시스템의 필요요구 사항에 맞게 크기와 형태, 조성을 맞춤화했습니다.
  • Precision Design: 반복 가능하고 균일한 박막 결과를 위해 엄격한 공차로 제조되었습니다.
  • Flexible Supply Chain: 최고의 제조업체와 강력한 파트너십을 통해 일관된 품질과 on-time 납품을 보장합니다.

 


OXIDE TARGET

Aluminum-doped Lithium Manganese Oxide Target (AlLiMn2O4)


 

 

AlLiMn2O4 Product Overview

 

Stanford Advanced Materials (SAM) introduces the Aluminum-Doped Lithium Manganese Oxide Target (AlLiMn₂O₄), a high-purity sputtering material tailored to deliver superior structural stability and enhanced electrochemical performance. This target is perfect for cutting-edge thin-film battery technologies and advanced energy storage solutions, providing exceptional reliability and efficiency for modern applications.

 

AlLiMn2O4 Key Specifications

  • Material Composition: AlLiMn₂O₄
  • Purity: 99.9%
  • Shape: Planar Disc

Note: The specifications provided are based on theoretical data. For customized requirements and detailed inquiries, please contact us.

 

AlLiMn2O4 Detailed Product Description

The Aluminum-Doped Lithium Manganese Oxide Target (AlLiMn₂O₄) enhances the performance of standard LiMn₂O₄ by incorporating Al³⁺ ions into the spinel lattice. This substitution mitigates Jahn-Teller distortions typically caused by Mn³⁺, thereby improving the material’s structural integrity during charge-discharge cycles. The addition of aluminum not only stabilizes the crystal structure but also increases resistance to phase transitions and capacity degradation, making it highly suitable for thin-film lithium-ion battery applications.

Key features include:

  • Enhanced Structural Stability: Aluminum doping strengthens the spinel framework, reducing distortions and maintaining structural integrity over multiple cycles.
  • Improved Thermal Stability: The modified composition offers greater resistance to thermal fluctuations, ensuring consistent performance.
  • Superior Electrochemical Performance: Enhanced lithium-ion diffusion pathways and moderate electrical conductivity contribute to better electrochemical kinetics and overall battery efficiency.
  • High Compositional Uniformity: Ensures reliable and uniform thin-film deposition, essential for high-performance energy storage devices.
  • Compatibility with Deposition Techniques: Easily integrates with sputtering and pulsed laser deposition (PLD) methods, facilitating seamless manufacturing processes.

These attributes make AlLiMn₂O₄ an excellent choice for next-generation energy storage systems, providing both durability and high performance.

 

AlLiMn2O4 Applications

  • Thin-Film Lithium-Ion Batteries: Utilized as a cathode material to achieve higher thermal and structural stability.
  • Microbatteries: Ideal for powering compact electronics, medical implants, and MEMS devices requiring long cycle life and consistent performance.
  • Advanced Energy Storage Devices: Suitable for applications demanding high-rate capability and thermal robustness.
  • Research and Development: Employed in the exploration and development of innovative energy materials and advanced cathode technologies.

 

AlLiMn2O4 Packaging Details

Our Aluminum-Doped Lithium Manganese Oxide Targets are meticulously packaged to ensure their protection during transit and storage. Depending on the dimensions, smaller targets are securely placed in polypropylene (PP) boxes, while larger targets are shipped in custom-designed wooden crates. We prioritize customized packaging solutions and utilize appropriate cushioning materials to provide optimal protection throughout transportation.

Packaging Options:

  • Carton
  • Wooden Crate
  • Customized Packaging

 

Manufacturing Process

Manufacturing Workflow


 

Testing Methods

  1. Chemical Composition Verification: Utilize techniques such as Glow Discharge Mass Spectrometry (GDMS) or X-ray Fluorescence (XRF) to ensure the material meets purity and composition standards.
  2. Mechanical Properties Assessment: Perform tests for tensile strength, yield strength, and elongation to evaluate material performance.
  3. Dimensional Measurements: Measure thickness, diameter, and other dimensions to ensure compliance with specified tolerances.
  4. Surface Quality Inspection: Detect defects such as scratches, cracks, or inclusions through visual and ultrasonic examinations.
  5. Hardness Evaluation: Assess material hardness to ensure uniformity and mechanical reliability.

 

Frequently Asked Questions

Q1: What benefits does AlLiMn₂O₄ provide as a sputtering target?
A1: AlLiMn₂O₄ offers enhanced thermal stability, improved structural integrity, and superior electrochemical performance compared to undoped LiMn₂O₄, making it ideal for thin-film lithium-ion battery applications.

Q2: Can this material be used in both RF and DC sputtering systems?
A2: Yes, AlLiMn₂O₄ targets are compatible with both RF and DC sputtering systems, depending on the equipment used and the desired characteristics of the deposited film.

Q3: What are the recommended storage and handling practices for AlLiMn₂O₄ targets?
A3: AlLiMn₂O₄ targets should be stored in a dry, clean environment and handled with gloves to prevent contamination and moisture absorption.

 

Performance Comparison: AlLiMn₂O₄ vs. Competing Materials

Property AlLiMn₂O₄ (Al-doped, x=0.04) LiMn₂O₄ (Standard) B-doped LiMn₂O₄ LiCoO₂ LiCoO₂ NMC 811 AlPO₄-coated LiMn₂O₄
Working Voltage (V vs. Li/Li⁺) 4.0 4.0 4.0 3.8 3.4 3.6–4.3 4.0
Specific Capacity (mAh/g) 122.3 (0.25C)

99.7 (initial)

124.9 (1C) 140–160 150–170     180–200 28.77 mg/g/h (Li⁺ release)
Cycle Stability (Capacity Retention) 99.5% @50 cycles (0.25C) 87.4% @50 cycles 94.2% @180 cycles (1C) ~80% @500 cycles >95% @500 cycles ~90% @500 cycles 93.6% @20 cycles
Li⁺ Diffusion Coefficient (cm²/s) ~1×10⁻¹⁰ ~1×10⁻¹¹ N/A ~1×10⁻¹¹ ~1×10⁻¹⁴ ~5×10⁻¹¹ Improved Li⁺ transport
Crystal Structure Spinel Spinel Spinel Layered     Olivine Layered Spinel
Cost Medium Low N/A Very High Low High N/A

 

Raw Materials Information

 

Aluminum (Al)

Aluminum is a lightweight, silvery-white metal with the atomic number 13, renowned for being the most abundant metal in the Earth’s crust. It boasts excellent corrosion resistance, high thermal and electrical conductivity, and remarkable malleability. Aluminum naturally forms a protective oxide layer on its surface, preventing further oxidation and enhancing durability. With a low density of approximately 2.7 g/cm³, aluminum is ideal for applications where weight is a critical factor, such as in aerospace, transportation, and packaging industries. Additionally, aluminum is widely used as an alloying element to improve the properties of other metals and materials.

 

Lithium (Li)

Lithium is a soft, silvery-white alkali metal with atomic number 3, celebrated for its high electrochemical potential. It is a vital component in rechargeable batteries, including lithium-ion and solid-state variants. Beyond batteries, lithium is utilized in advanced ceramics, glass production, and lightweight metal alloys, contributing to a range of high-performance applications.

 

Manganese (Mn)

Manganese is a hard, brittle gray-white metal with atomic number 25, commonly used to enhance the strength, toughness, and wear resistance of steel and other alloys. It plays a crucial role in lithium-ion battery cathode materials due to its favorable redox properties and cost-effectiveness. In advanced materials and thin films, manganese is a key element in magnetic and oxide compounds, such as Lanthanum Strontium Manganite (LSMO), which is utilized in spintronics, magnetic sensors, and memory devices thanks to its colossal magnetoresistance and other functional attributes.

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